CVD TiN CIP Chamber Kit
Process Kit Design Extension: Singular Edge Ring / Outer Shield / Showerhead / Ceramic Isolator / Inner Shield / Top Shield Ceramic / Pumping Port / Chamber Insert
- Defects Reduction & Increase kit life
Provide stable defects throughout the kit life and increase kit life.
- Eliminate Arcing
Eliminate arcing issues due to material build-up.
- Uniformity Improvement
Improve uniformity from the beginning of the kit life to the end of the kit life