CVD TiN CIP Kit-軒運科技有限公司-半導體設備廠商

軒運科技股份有限公司

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半導體設備廠商TOP10-軒運科技有限公司

CVD TiN CIP Chamber Kit

CIP半導體設備零件

CVD TiN CIP Chamber Kit

Process Kit Design Extension: Singular Edge Ring / Outer Shield / Showerhead / Ceramic Isolator / Inner Shield / Top Shield Ceramic / Pumping Port / Chamber Insert

  • Defects Reduction & Increase kit life
Provide stable defects throughout the kit life and increase kit life.
  • Eliminate Arcing
Eliminate arcing issues due to material build-up.
  • Uniformity Improvement
Improve uniformity from the beginning of the kit life to the end of the kit life